96237 - SCME - URE/PD Hands-on Microsystems Fabrication Experience Preparation Short Course

Course Overview

The Support Center for Microsystems Education (SCME), a National Science Foundation (NSF) Advanced Technological Education (ATE) center, provides professional development for faculty and undergraduate research experiences for students in technician education programs.

This course is required prior to coming to the University of New Mexico for the one or two week cleanroom experience and will prepare both students and faculty so that all can maximize learning. The course will cover cleanroom safety and protocols. It will also provide preparatory on Microsystems Fabrication principals, process flows, basic equipment and operational procedures and additional background information on microelectromechanical systems (MEMS).

What You'll Learn

1) Fundamental cleanroom safety and protocols
2) How a micro pressure sensor is made and functions
3) Basics of micro fluidic and micro needle fabrication
4) Essentials of photolithography, wet and dry etching, and metal deposition processes
5) Overview of several micro characterization methods

Once completing this course, participants will be ready to complete the one week cleanroom, with hands-on experience which includes the fabrication and characterization of:

1. an ART wafer of their own design
2. a functioning micro pressure sensor
3. micro fluidic and micro needle structures

If students continue for additional hands-on weeks, they will be able to delve deeper into characterizing and creating more complex structures and processes.

Who Should Attend

Those interested in this course need to be approved by Dr. Matthias Pleil; mpleil@unm.edu, and meet one of the following criteria:

1. Faculty teaching at a technical college
2. Technician student in a certificate or 2-year micro/nano or related technology program (i.e., engineering technology, biotech, manufacturing technology)